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Title: Note: Large area deposition of Rh single and Rh/W/Cu multilayer thin films on stainless steel substrate by pulsed laser deposition technique

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.4869783· OSTI ID:22254963
;  [1]
  1. Department of Physics, Indian Institute of Technology Guwahati, Guwahati 781039 (India)

Mirror like thin films of single layer Rh and multilayer Rh/W/Cu are deposited on highly polished 50 mm diameter stainless steel substrate by Pulsed Laser Deposition (PLD) technique for first mirror application in fusion reactors. For this, the conventional PLD technique has been modified by incorporating substrate rastering stage for large area deposition via PLD. Process optimization to achieve uniformity of deposition as estimated from fringe visibility and thickness is also discussed.

OSTI ID:
22254963
Journal Information:
Review of Scientific Instruments, Vol. 85, Issue 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English