Extracted ion current density in close-coupling multi-antenna type radio frequency driven ion source: CC-MATIS

Journal Article · Sat Feb 15 00:00:00 EST 2014 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4830363· OSTI ID:22254179

Shoji, T. ^[1]

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1. Nagoya University, Chikusa, Nagoya 464-8603 (Japan)

Positive ions are extracted by using a small extractor from the Close-Coupling Multi-Antenna Type radio frequency driven Ion Source. Two types of RF antenna are used. The maximum extracted ion current density reaches 0.106 A/cm{sup 2}. The RF net power efficiency of the extracted ion current density under standard condition is 11.6 mA/cm{sup 2}/kW. The efficiency corresponds to the level of previous beam experiments on elementary designs of multi-antenna sources, and also to the efficiency level of a plasma driven by a filament in the same chamber. The multi-antenna type RF plasma source is promising for all metal high density ion sources in a large volume chamber.

• OSTI ID: 22254179
• Journal Information: Review of Scientific Instruments, Vol. 85, Issue 2; Conference: ICIS 2011: 14. international conference on ion sources, Giardini-Naxos, Sicily (Italy), 12-16 Sep 2011; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ANTENNAS
CATIONS
CURRENT DENSITY
EFFICIENCY
ION BEAMS
ION DENSITY
METALS
PLASMA
RADIOWAVE RADIATION