Design of a new electron cyclotron resonance ion source at Oshima National College of Maritime Technology
Journal Article
·
· Review of Scientific Instruments
- Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193 (Japan)
- Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama 930-1305 (Japan)
- Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
A new electron cyclotron resonance ion/plasma source has been designed and will be built at Oshima National College of Maritime Technology by early 2014. We have developed an ion source that allows the control of the plasma parameters over a wide range of electron temperatures for material research. A minimum-B magnetic field composed of axial mirror fields and radial cusp fields was designed using mainly Nd-Fe-B permanent magnets. The axial magnetic field can be varied by three solenoid coils. The apparatus has 2.45 GHz magnetron and 2.5–6.0 GHz solid-state microwave sources.
- OSTI ID:
- 22253725
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 85; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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