Design of a new electron cyclotron resonance ion source at Oshima National College of Maritime Technology

Journal Article · Sat Feb 15 00:00:00 EST 2014 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4847235· OSTI ID:22253725

Hirabara, N.; Izumihara, T.; Nakamizu, T.; Ohba, T.; Nakamura, T.; Furuse, M. ^[1]; Hitobo, T. ^[2]; Kato, Y. ^[3]

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1. Oshima National College of Maritime Technology (OCMT), 1091-1 Komatsu, Suo-oshima, Yamaguchi 742-2193 (Japan)
2. Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama 930-1305 (Japan)
3. Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)

A new electron cyclotron resonance ion/plasma source has been designed and will be built at Oshima National College of Maritime Technology by early 2014. We have developed an ion source that allows the control of the plasma parameters over a wide range of electron temperatures for material research. A minimum-B magnetic field composed of axial mirror fields and radial cusp fields was designed using mainly Nd-Fe-B permanent magnets. The axial magnetic field can be varied by three solenoid coils. The apparatus has 2.45 GHz magnetron and 2.5–6.0 GHz solid-state microwave sources.

• OSTI ID: 22253725
• Journal Information: Review of Scientific Instruments, Vol. 85, Issue 2; Conference: ICIS 2011: 14. international conference on ion sources, Giardini-Naxos, Sicily (Italy), 12-16 Sep 2011; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CUSPED GEOMETRIES
ECR ION SOURCES
ELECTRON CYCLOTRON-RESONANCE
ELECTRON TEMPERATURE
MAGNETIC FIELDS
MAGNETRONS
MICROWAVE RADIATION
PERMANENT MAGNETS
PLASMA
SOLENOIDS