Control of ions energy distribution in dual-frequency magnetron sputtering discharges

Journal Article · Tue Apr 15 00:00:00 EDT 2014 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4873401· OSTI ID:22253072

Ye, Chao; He, Haijie; Huang, Fupei; Liu, Yi ^[1]; Wang, Xiangying ^[2]

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1. School of Physics Science and Technology, Jiangsu Key Laboratory of Thin Films, Soochow University, Suzhou 215006 (China)
2. Medical College of Soochow University, Suzhou 215123 (China)

The ion energy distributions (IEDs) in the dual-frequency magnetron sputtering discharges were investigated by retarding field energy analyzer. Increasing power ratio of 2 MHz to 13.56 (27.12 or 60) MHz led to the evolution of IEDs from a uni-modal distribution towards a uni-modal distribution with high-energy peak shoulder and a bi-modal distribution. While increasing power ratio of 13.56 MHz to 27.12 MHz and 27.12 MHz to 60 MHz, led to the increase of peak energy. The evolution of IEDs shape and the increase of peak energy are due to the change of ions responding to the average field of high-frequency period towards the instantaneous sheath potential of low-frequency period.

• OSTI ID: 22253072
• Journal Information: Physics of Plasmas, Vol. 21, Issue 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
DISTRIBUTION
ENERGY SPECTRA
MAGNETRONS
MHZ RANGE 01-100
PEAKS