The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas
- Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, P.O. Box 49, H-1525 Budapest (Hungary)
- Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum (Germany)
In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics, a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently, the Secondary Electron Asymmetry Effect (SEAE) was discovered (Lafleur et al., J. Phys. D: Appl. Phys. 46, 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single-frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e., a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find that the superposition of the EAE and the SEAE is generally non-linear, i.e., the asymmetries generated by each individual effect do not simply add up at all phases. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.
- OSTI ID:
- 22218220
- Journal Information:
- Applied Physics Letters, Vol. 103, Issue 6; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
Effect of driving voltages in dual capacitively coupled radio frequency plasma: A study by nonlinear global model
Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model