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U.S. Department of Energy
Office of Scientific and Technical Information

Support for the 65th International Conference on Electron, Ion, and Photon Beam Technologies and Nanofabrication

Technical Report ·
DOI:https://doi.org/10.2172/2216920· OSTI ID:2216920
 [1]
  1. National Institute of Standards and Technology (NIST), Boulder, CO (United States); University of Texas at Austin
This project aimed to enable student participation in the 65th International Conference on Electron, Ion, and Photon Beam Technologies and Nanofabrication (EIPBN). EIPBN, affectionately known as “3-Beams,” is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; nanofabrication process technologies; atomically precise fabrication; related emerging technologies; and their applications in a broad spectrum of fields. It is where top researchers from academia, government laboratories, and industries from around the world meet to present and discuss recent trends and future innovations in these technologies. The goal of the conference is to advance knowledge by enabling the exchange of information concerning advanced and emerging nanofabrication and nanomanufacturing topics and how they enable traditional and novel applications.
Research Organization:
University of Texas, Austin, TX (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
SC0022754
OSTI ID:
2216920
Report Number(s):
DOE-UTEXAS--22754
Country of Publication:
United States
Language:
English

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