Application of pyroelectric crystal and ionic liquid to the production of metal compounds
- Department of Materials Science and Engineering, Kyoto University, Sakyo, Kyoto 606-8501 (Japan)
Zinc fluoride (ZnF{sub 2}) was deposited on a silicon substrate by changing temperature of a pyroelectric crystal of LiTaO{sub 3} on which ionic liquid (EMI-Tf{sub 2}N) containing zinc ions was dripped at 1 Pa. ZnF{sub 2} was also obtained by bombarding argon ions on EMI-Tf{sub 2}N containing zinc ions. From these results, it is concluded that EMI-Tf{sub 2}N containing zinc ions on the LiTaO{sub 3} crystal was evaporated on the silicon substrate by changing temperature of the LiTaO{sub 3} crystal in vacuum and that the evaporated EMI-Tf{sub 2}N containing metal zinc ions was decomposed to ZnF{sub 2} by the bombardment of electrons accelerated by the electric field between the LiTaO{sub 3} crystal and the silicon substrate.
- OSTI ID:
- 22116971
- Journal Information:
- AIP Conference Proceedings, Vol. 1525, Issue 1; Conference: 22. international conference on application of accelerators in research and industry, Ft. Worth, TX (United States), 5-10 Aug 2012; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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