Analysis of soft x-ray/VUV transmission characteristics of Si and Al filters
- Department of Physics, Indian Institute of Technology, New Delhi 110 016 (India)
- X-ray Optics Section, ISU Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013 (India)
Ultrathin filters of Al (1500A) and Si (1200A) should exhibit more than 65% transmission above their Labsorption edges in the soft x-ray/vacuum ultra violet region(Si L-edge: 124 A and Al L-edge: 170 A). However, the measured transmission characteristics of these filters showed {approx}40% transmission. The transmission measurements of these filters were carried at the reflectivity beamline of Indus-1 synchrotron source out over a large wavelength range of 120-360A. In order to understand the measured transmission performance a detailed model fitting is performed using the Paratt formalism. It is found that the oxidation of the surface region of the filters is responsible for the reduced transmission performance. Effects of higher harmonics of the toroidal grating monochromator are also considered in the data analysis.
- OSTI ID:
- 22115999
- Journal Information:
- AIP Conference Proceedings, Vol. 1512, Issue 1; Conference: 57. DAE solid state physics symposium 2012, Mumbai (India), 3-7 Dec 2012; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM
DATA ANALYSIS
FAR ULTRAVIOLET RADIATION
INDUS-1
MONOCHROMATORS
OPTICAL FILTERS
OXIDATION
PERFORMANCE
REFLECTIVITY
SEMICONDUCTOR MATERIALS
SILICON
SOFT X RADIATION
TRANSMISSION
ULTRAVIOLET SPECTRA
X-RAY DIFFRACTION