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Title: Charging and de-charging of dust particles in bulk region of a radio frequency discharge plasma

Journal Article · · Physics of Plasmas
DOI:https://doi.org/10.1063/1.4798417· OSTI ID:22107730
 [1]; ;  [2]
  1. Institute for Plasma Research, Gandhinagar 382428 (India)
  2. Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi 110016 (India)

An analysis to investigate the effect of the dust particle size and density on the floating potential of the dust particles of uniform radius and other plasma parameters in the bulk region plasma of a RF-discharge in collisionless/collisional regime has been presented herein. For this purpose, the average charge theory based on charge balance on dust and number balance of plasma constituents has been utilized; a derivation for the accretion rate of electrons corresponding to a drifting Maxwellian energy distribution in the presence of an oscillatory RF field has been given and the resulting expression has been used to determine the floating potential of the dust grains. Further, the de-charging of the dust grains after switching off the RF field has also been discussed.

OSTI ID:
22107730
Journal Information:
Physics of Plasmas, Vol. 20, Issue 3; Other Information: (c) 2013 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
Country of Publication:
United States
Language:
English