Quantitative determination of mass-resolved ion densities in H{sub 2}-Ar inductively coupled radio frequency plasmas

Journal Article · Thu Mar 07 04:00:00 EST 2013 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4794165· OSTI ID:22102292

Sode, M.; Schwarz-Selinger, T.; Jacob, W. ^[1]

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1. Max-Planck-Institut fuer Plasmaphysik, EURATOM Association, Boltzmannstrasse 2, D-85748 Garching (Germany)

Inductively coupled H{sub 2}-Ar plasmas are characterized by an energy-dispersive mass spectrometer (plasma monitor), a retarding field analyzer, optical emission spectroscopy, and a Langmuir probe. A procedure is presented that allows determining quantitatively the absolute ion densities of Ar{sup +}, H{sup +}, H{sub 2}{sup +}, H{sub 3}{sup +}, and ArH{sup +} from the plasma monitor raw signals. The calibration procedure considers the energy and mass-dependent transmission of the plasma monitor. It is shown that an additional diagnostic like a Langmuir probe or a retarding field analyzer is necessary to derive absolute fluxes with the plasma monitor. The conversion from fluxes into densities is based on a sheath and density profile model. Measurements were conducted for a total gas pressure of 1.0 Pa. For pure H{sub 2} plasmas, the dominant ion is H{sub 3}{sup +}. For mixed H{sub 2}-Ar plasmas, the ArH{sup +} molecular ion is the most dominant ion species in a wide parameter range. The electron density, n{sub e}, is around 3 Multiplication-Sign 10{sup 16} m{sup -3} and the electron temperature, T{sub e}, decreases from 5 to 3 eV with increasing Ar content. The dissociation degree was measured by actinometry. It is around 1.7% nearly independent on Ar content. The gas temperature, estimated by the rotational distribution of the Q-branch lines of the H{sub 2} Fulcher-{alpha} diagonal band (v Prime =v Double-Prime =2) is estimated to (540 {+-} 50) K.

• OSTI ID: 22102292
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 9 Vol. 113; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON IONS
DENSITY
ELECTRON DENSITY
ELECTRON TEMPERATURE
EMISSION SPECTROSCOPY
HIGH-FREQUENCY DISCHARGES
HYDROGEN IONS 1 PLUS
HYDROGEN IONS 2 PLUS
HYDROGEN IONS 3 PLUS
ION DENSITY
ION TEMPERATURE
LANGMUIR PROBE
MASS
MASS SPECTROMETERS
PLASMA
PLASMA DENSITY
SPECTRA