High precision deflection measurement of microcantilever in an optical pickup head based atomic force microscopy

Journal Article · Thu Nov 15 00:00:00 EST 2012 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4768459· OSTI ID:22093987

Lee, Sang Heon ^[1]

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1. Department of Mechanical Design Engineering, Andong National University, Andong 760-749 (Korea, Republic of)

This paper presents the methodology to measure the precise deflection of microcantilever in an optical pickup head based atomic force microscopy. In this paper, three types of calibration methods have been proposed: full linearization, sectioned linearization, and the method based on astigmatism. In addition, the probe heads for easy calibration of optical pickup head and fast replacement of optical pickup head have been developed. The performances of each method have been compared through a set of experiments and constant height mode operation which was not possible in the optical pickup head based atomic force microscopy has been carried out successfully.

• OSTI ID: 22093987
• Journal Information: Review of Scientific Instruments, Vol. 83, Issue 11; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ACCURACY
ATOMIC FORCE MICROSCOPY
CALIBRATION
PERFORMANCE