Incident flux angle induced crystal texture transformation in nanostructured molybdenum films

Journal Article · Sun Jul 15 04:00:00 EDT 2012 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4737403· OSTI ID:22089346

Chen, L.; Lu, T. -M.; Wang, G. -C. ^[1]

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1. Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, 110 8th Street, Troy, New York 12180 (United States)

Molybdenum films were observed to undergo a dramatic change in crystal texture orientation when the incident flux angle was varied in an oblique angle sputter deposition on amorphous substrates. Reflection high-energy electron diffraction pole figure and scanning electron microscopy were used to analyze in detail the texture orientation of the films. The normal incident deposition resulted in a fiber texture film with the minimum energy (110) crystal plane parallel to the substrate surface. A (110)[110] biaxial texture was observed for the samples grown with low incident angles of less than 45 Degree-Sign , with respect to the surface normal. On the other hand, for an oblique angle deposition of larger than 60 Degree-Sign , a (111)[112] biaxial texture was observed and appeared to be consistent with a zone T structure where the geometrically fastest growth [001] direction of a crystal plays a dominant role in defining the texture. We argue that a structural transition had occurred when the incident flux was varied from near normal incidence to a large angle.

• OSTI ID: 22089346
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 2 Vol. 112; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY
ACCIDENTS
AMORPHOUS STATE
CRYSTALS
DEPOSITION
ELECTRON DIFFRACTION
FIBERS
MATERIALS
MOLYBDENUM
NANOSTRUCTURES
ORIENTATION
PHASE TRANSFORMATIONS
REFLECTION
SCANNING ELECTRON MICROSCOPY
SOLIDS
SPUTTERING
SUBSTRATES
SURFACES
TEXTURE
THIN FILMS