The discharge condition to enhance electron density of capacitively coupled plasma with multi-holed electrode

Journal Article · Sat Sep 15 00:00:00 EDT 2012 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4748576· OSTI ID:22086183

Lee, Hun Su ^[1]; Lee, Yun Seong; Chang, Hong Young ^[2]

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1. Institute of Advanced Composite Materials, Korea Institute of Science and Technology, Eunha-ri, Bongdong-eup, Wanju-gun, Jeollabuk-do, 565-902 (Korea, Republic of)
2. Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 305-701 (Korea, Republic of)

The multi-holed electrode that has been reported to enhance the electron density of the capacitively coupled plasma is now being adopted to speed up the processes. However, the discharge condition when the multi-holed electrode enhances the electron density of the discharge at fixed power is not studied. At low pressure, the multi-holed electrode increased the electron density of the plasma at fixed power. However, the multi-holed electrode is experimentally revealed to lower the electron density at high pressure. In this paper, the different roles of the multi-holed electrode are experimentally studied.

• OSTI ID: 22086183
• Journal Information: Physics of Plasmas, Vol. 19, Issue 9; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC DISCHARGES
ELECTRODES
ELECTRON DENSITY
PLASMA
PLASMA DENSITY
PLASMA PRESSURE
PRESSURE RANGE MEGA PA 10-100