Alfven's critical ionization velocity observed in high power impulse magnetron sputtering discharges

Journal Article · Sat Sep 15 00:00:00 EDT 2012 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4752073· OSTI ID:22086180

Brenning, N; Lundin, D ^[1]

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1. Division of Space and Plasma Physics, School of Electric Engineering, Royal Institute of Technology, SE-100 44, Stockholm (Sweden)

Azimuthally rotating dense plasma structures, spokes, have recently been detected in several high power impulse magnetron sputtering (HiPIMS) devices used for thin film deposition and surface treatment, and are thought to be important for plasma buildup, energizing of electrons, as well as cross-B transport of charged particles. In this work, the drift velocities of these spokes are shown to be strongly correlated with the critical ionization velocity, CIV, proposed by Alfven. It is proposed as the most promising approach in combining the CIV and HiPIMS research fields is to focus on the role of spokes in the process of electron energization.

• OSTI ID: 22086180
• Journal Information: Physics of Plasmas, Vol. 19, Issue 9; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALFVEN WAVES
CHARGED-PARTICLE TRANSPORT
ELECTRONS
IONIZATION
MAGNETRONS
PLASMA
SPUTTERING
SURFACE COATING
SURFACE TREATMENTS
THIN FILMS