Tomographic scanning microscope for 1-4 KeV x-rays
Conference
·
OSTI ID:220795
- Argonne National Lab., IL (United States). Advanced Photon Source
- Lawrence Livermore National Lab., CA (United States)
X-ray microtomography enables three-dimensional imaging at submicron resolution with elemental and chemical state contrast. The 1-4 KeV energy region is promising for microtomography of biological, microelectronics, and materials sciences specimens. To capitalize on this potential, the authors are constructing a tomographic scanning x-ray microscope for 1-4 KeV x-rays on a spherical grating monochromator beamline at the Advanced Photon Source. The microscope, which uses zone plate optics, has an anticipated spatial resolution of 100 nm and an energy resolution of better than 1 eV.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 220795
- Report Number(s):
- CONF-950793--; ISBN 0-8194-1875-7
- Country of Publication:
- United States
- Language:
- English
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