skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Enhanced production of ECR plasma by using pulse mode microwaves on a large bore ECRIS with permanent magnets

Abstract

In order to enhance the efficiency of an electron cyclotron resonance (ECR) plasma for a broad and dense ion beam source at low pressure, the magnetic field configuration is constructed by all permanent magnets. By using the pulse mode, we aim at the generation of plasma with parameters that cannot be achieved in the CW mode at microwave frequencies of 11-13GHz, under the constraint of the same average incident microwave powers. It is found that the total beam currents are increased by the pulse mode operation compared with the case of the CW mode. According to probe measurements of the ECR plasma, it is found that the electron density in the pulse mode is larger than that in the CW mode, while the electron temperatures in the pulse mode are lower than that in the CW mode. These results are discussed from the viewpoint of relaxation times obtained on plasma parameters and ECR efficiency. The cause of the beam current increment and operational windows spread due to the pulse mode are also discussed on these parameters suitable to production of molecular/cluster ions.

Authors:
; ; ; ; ; ; ;  [1]
  1. Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka Univ., 2-1 Ymadaoka, Suita-shi, Osaka, 565-0871 (Japan)
Publication Date:
OSTI Identifier:
22075729
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1496; Journal Issue: 1; Conference: 19. international conference on ion implantation technology, Valladolid (Spain), 25-29 Jun 2012; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; BEAM CURRENTS; ECR ION SOURCES; ELECTRON CYCLOTRON-RESONANCE; ELECTRON DENSITY; ELECTRON TEMPERATURE; ION BEAMS; ION TEMPERATURE; IONS; MAGNETIC FIELD CONFIGURATIONS; MICROWAVE RADIATION; MOLECULAR CLUSTERS; PERMANENT MAGNETS; PLASMA; PLASMA CONFINEMENT; PLASMA DENSITY; PLASMA PRODUCTION; RELAXATION; RF SYSTEMS

Citation Formats

Kato, Yushi, Kiriyama, Ryutaro, Takenaka, Tomoya, Kurisu, Yosuke, Nozaki, Dai, Yano, Keisuke, Sato, Fuminobu, and Iida, Toshiyuki. Enhanced production of ECR plasma by using pulse mode microwaves on a large bore ECRIS with permanent magnets. United States: N. p., 2012. Web. doi:10.1063/1.4766579.
Kato, Yushi, Kiriyama, Ryutaro, Takenaka, Tomoya, Kurisu, Yosuke, Nozaki, Dai, Yano, Keisuke, Sato, Fuminobu, & Iida, Toshiyuki. Enhanced production of ECR plasma by using pulse mode microwaves on a large bore ECRIS with permanent magnets. United States. doi:10.1063/1.4766579.
Kato, Yushi, Kiriyama, Ryutaro, Takenaka, Tomoya, Kurisu, Yosuke, Nozaki, Dai, Yano, Keisuke, Sato, Fuminobu, and Iida, Toshiyuki. Tue . "Enhanced production of ECR plasma by using pulse mode microwaves on a large bore ECRIS with permanent magnets". United States. doi:10.1063/1.4766579.
@article{osti_22075729,
title = {Enhanced production of ECR plasma by using pulse mode microwaves on a large bore ECRIS with permanent magnets},
author = {Kato, Yushi and Kiriyama, Ryutaro and Takenaka, Tomoya and Kurisu, Yosuke and Nozaki, Dai and Yano, Keisuke and Sato, Fuminobu and Iida, Toshiyuki},
abstractNote = {In order to enhance the efficiency of an electron cyclotron resonance (ECR) plasma for a broad and dense ion beam source at low pressure, the magnetic field configuration is constructed by all permanent magnets. By using the pulse mode, we aim at the generation of plasma with parameters that cannot be achieved in the CW mode at microwave frequencies of 11-13GHz, under the constraint of the same average incident microwave powers. It is found that the total beam currents are increased by the pulse mode operation compared with the case of the CW mode. According to probe measurements of the ECR plasma, it is found that the electron density in the pulse mode is larger than that in the CW mode, while the electron temperatures in the pulse mode are lower than that in the CW mode. These results are discussed from the viewpoint of relaxation times obtained on plasma parameters and ECR efficiency. The cause of the beam current increment and operational windows spread due to the pulse mode are also discussed on these parameters suitable to production of molecular/cluster ions.},
doi = {10.1063/1.4766579},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1496,
place = {United States},
year = {2012},
month = {11}
}