Nanomechanical and nanotribological properties of Nb substituted TiN thin films
Journal Article
·
· AIP Conference Proceedings
- School of Physics, Centre for Nanotechnology, University of Hyderabad, Hyderabad-500 046 (India)
Nanomechanical and nanotribological properties of Ti{sub 1-x}Nb{sub x}N (0{<=}x{<=}1) thin films were investigated as a function x. The films were deposited onto polycrystalline nuclear grade 316LN stainless steel (SS) substrate by radio frequency magnetron sputtering in 100% N{sub 2} plasma. The hardness and Young's modulus increased while the friction coefficient and wear volume decreased with increasing Nb substitution. The highest hardness achieved was 31GPa for x=0.77. At the same Nb concentration, the friction coefficient was 0.15 and the elastic recovery was 60%.
- OSTI ID:
- 22068991
- Journal Information:
- AIP Conference Proceedings, Vol. 1451, Issue 1; Conference: Indian Vacuum Society symposium on thin films, Mumbai (India), 9-12 Nov 2011; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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