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Mass determination and sensitivity based on resonance frequency changes of the higher flexural modes of cantilever sensors

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.3563724· OSTI ID:22068449
;  [1]
  1. EaStCHEM School of Chemistry, University of St. Andrews, North Haugh, St. Andrews, KY16 9ST (United Kingdom)

Micro- and nanocantilevers are increasingly employed as mass sensors. Most studies consider the first flexural mode and adsorbed masses that are either discretely attached or homogeneously distributed along the entire length of the cantilever. We derive general expressions that allow for the determination of the total attached mass with any mass distribution along the cantilever length and all flexural modes. The expressions are valid for all cantilevers whose flexural deflection can be described by a one-dimensional function. This approach includes the most common types of microcantilevers, namely, rectangular, picket, and V-shaped. The theoretical results are compared with experimental data up to the fourth flexural mode obtained from thermal noise spectra of rectangular and V-shaped cantilevers.

OSTI ID:
22068449
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 82; ISSN 0034-6748; ISSN RSINAK
Country of Publication:
United States
Language:
English

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