Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis

Journal Article · Tue Nov 15 00:00:00 EST 2011 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3657156· OSTI ID:22063749

Horiba, K; Oshima, M ^[1]; Nakamura, Y; Nagamura, N; Toyoda, S ^[1]; Kumigashira, H ^[1]; Amemiya, K ^[2]; Senba, Y; Ohashi, H ^[3]

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1. Department of Applied Chemistry, University of Tokyo, Tokyo 113-8656 (Japan)
2. Core Research for Evolutional Science and Technology (CREST), Japan Science and Technology Agency (JST), Tokyo 102-0075 (Japan)
3. JASRI/SPring-8, Hyogo 679-5198 (Japan)

In order to achieve nondestructive observation of the three-dimensional spatially resolved electronic structure of solids, we have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system 3D nano-ESCA. For focusing the x-ray, a Fresnel zone plate with a diameter of 200 {mu}m and an outermost zone width of 35 nm is used. In order to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample, we adopted a modified VG Scienta R3000 analyzer with an acceptance angle of 60 deg. as a high-resolution angle-resolved electron spectrometer. The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. From the results of the line-scan profiles of the poly-Si/high-k gate patterns, we achieved a total spatial resolution better than 70 nm. The capability of our system for pinpoint depth-profile analysis and high-resolution chemical state analysis is demonstrated.

• OSTI ID: 22063749
• Journal Information: Review of Scientific Instruments, Vol. 82, Issue 11; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CHEMICAL ANALYSIS
ELECTRON SPECTROMETERS
ELECTRONIC STRUCTURE
FOCUSING
FRESNEL LENS
NANOSTRUCTURES
SCANNING ELECTRON MICROSCOPY
SPATIAL RESOLUTION
SPRING-8 STORAGE RING
THREE-DIMENSIONAL CALCULATIONS
X RADIATION
X-RAY PHOTOELECTRON SPECTROSCOPY