Prediction of atomic force microscope probe dynamics through the receptance coupling method

Journal Article · Thu Dec 15 04:00:00 EST 2011 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3664787· OSTI ID:22062391

Mehrpouya, M; Park, S S ^[1]

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1. Micro Engineering, Dynamics and Automation Laboratory (MEDAL), Department of Mechanical and Manufacturing Engineering, University of Calgary, Calgary, Alberta T2N 1N4 (Canada)

The increased growth in the use of tip-based sensing, manipulations, and fabrication of devices in atomic force microscopy (AFM) necessitates the accurate prediction of the dynamic behavior of the AFM probe. The chip holder, to which the micro-sensing device is attached, and the rest of the AFM system can affect the overall dynamics of the probe. In order to consider these boundary effects, we propose a novel receptance coupling method to mathematically combine the dynamics of the AFM setup and probe, based on the equilibrium and compatibility conditions at the joint. Once the frequency response functions of displacement over force at the tool tip are obtained, the dynamic interaction forces between the tip and the sample in nanoscale can be determined by measuring the probe tip displacement.

• OSTI ID: 22062391
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 12 Vol. 82; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC DISPLACEMENTS
ATOMIC FORCE MICROSCOPY
COMPATIBILITY
COUPLING
EQUILIBRIUM
INTERACTIONS
NANOSTRUCTURES
PROBES
RESPONSE FUNCTIONS