Fabrication of nanoscale patterns in lithium fluoride crystal using a 13.5 nm Schwarzschild objective and a laser produced plasma source

Journal Article · Thu Dec 15 00:00:00 EST 2011 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3665970· OSTI ID:22062386

Xin, Wang ^[1]; Baozhong, Mu; Li, Jiang; Jingtao, Zhu; Shengzhen, Yi; Zhanshan, Wang ^[1]; Pengfei, He ^[2]

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1. Key Laboratory of Advanced Micro-structured Materials, MOE, Department of Physics, Institute of Precision Optical Engineering, Tongji University, Shanghai 200092 (China)
2. School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092 (China)

Lithium fluoride (LiF) crystal is a radiation sensitive material widely used as EUV and soft x-ray detector. The LiF-based detector has high resolution, in principle limited by the point defect size, large field of view, and wide dynamic range. Using LiF crystal as an imaging detector, a resolution of 900 nm was achieved by a projection imaging of test meshes with a Schwarzschild objective operating at 13.5 nm. In addition, by imaging of a pinhole illuminated by the plasma, an EUV spot of 1.5 {mu}m diameter in the image plane of the objective was generated, which accomplished direct writing of color centers with resolution of 800 nm. In order to avoid sample damage and contamination due to the influence of huge debris flux produced by the plasma source, a spherical normal-incidence condenser was used to collect EUV radiation. Together with a description of experimental results, the development of the Schwarzschild objective, the influence of condenser on energy density and the alignment of the imaging system are also reported.

• OSTI ID: 22062386
• Journal Information: Review of Scientific Instruments, Vol. 82, Issue 12; Other Information: (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALIGNMENT
COLOR CENTERS
CONTAMINATION
CRYSTALS
DIELECTRIC TRACK DETECTORS
ENERGY DENSITY
IMAGES
LASER-PRODUCED PLASMA
LITHIUM FLUORIDES
NANOSTRUCTURES
RESOLUTION
SOFT X RADIATION
SPHERICAL CONFIGURATION
X-RAY DETECTION