Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam
- Department of Physics, Pohang University of Science and Technology, San 31, Hyoja-dong, Nam-gu, Pohang 790-784 (Korea, Republic of)
- Convergence Plasma Research Center, National Fusion Research Institute, Gwahangno 113, Yuseong-gu, Daejeon 305-333 (Korea, Republic of)
A 2.45 GHz electron cyclotron resonance (ECR) source with a magnetron magnetic field configuration was developed to meet the demand of a hyperthermal neutral beam (HNB) flux on a substrate of more than 1x10{sup 15} cm{sup -2} s{sup -1} for industrial applications. The parameters of the operating pressure, ion density, electron temperature, and distance between the neutralization plate and the substrate for the HNB source are specified in a theoretical analysis. The electron temperature and the ion density are measured to characterize the ECR HNB source using a Langmuir probe and optical emission spectroscopy. The parameters of the ECR HNB source are in good agreement with the theoretically specified parameters.
- OSTI ID:
- 22055713
- Journal Information:
- Review of Scientific Instruments, Vol. 81, Issue 8; Other Information: (c) 2010 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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