Broad-beam high-current dc ion source based on a two-stage glow discharge plasma

Journal Article · Mon Feb 15 04:00:00 EST 2010 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3258032· OSTI ID:22053874

Vizir, A V; Oks, E M; Yushkov, G Yu ^[1]

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1. High Current Electronics Institute, Siberian Division of the Russian Academy Sciences, Tomsk 634055 (Russian Federation)

We have designed, made, and demonstrated a broad-beam, dc, ion source based on a two-stage, hollow-cathode, and glow discharges plasma. The first-stage discharge (auxiliary discharge) produces electrons that are injected into the cathode cavity of a second-stage discharge (main discharge). The electron injection causes a decrease in the required operating pressure of the main discharge down to 0.05 mTorr and a decrease in required operating voltage down to about 50 V. The decrease in operating voltage of the main discharge leads to a decrease in the fraction of impurity ions in the ion beam extracted from the main gas discharge plasma to less than 0.2 %. Another feature of the source is a single-grid accelerating system in which the ion accelerating voltage is applied between the plasma itself and the grid electrode. The source has produced steady-state Ar, O, and N ion beams of about 14 cm diameter and current of more than 2 A at an accelerating voltage of up to 2 kV.

• OSTI ID: 22053874
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 81; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON IONS
ELECTRIC POTENTIAL
ELECTRON BEAM INJECTION
GLOW DISCHARGES
GRIDS
HOLLOW CATHODES
ION BEAMS
ION SOURCES
NITROGEN IONS
OXYGEN IONS
PLASMA
STEADY-STATE CONDITIONS