Stoichiometric analysis of compositionally graded combinatorial amorphous thin film oxides using laser-induced breakdown spectroscopy

Journal Article · Thu Jul 15 04:00:00 EDT 2010 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3455218· OSTI ID:22053773

Widjonarko, N Edwin ^[1]; Perkins, John D; Leisch, Jennifer E; Parilla, Philip A; Curtis, Calvin J; Ginley, David S; Berry, Joseph J ^[2]

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1. Department of Physics, 390 UCB, University of Colorado, Boulder, Colorado 80309-0390 (United States)
2. National Renewable Energy Laboratory, 1617 Cole Blvd., Golden, Colorado 80401 (United States)

Laser-induced breakdown spectroscopy (LIBS) is a recently developed locally destructive elemental analysis technique that can be used to analyze solid, liquid, and gaseous samples. In the system explored here, a neodymium-doped yttrium aluminum garnet laser ablates a small amount of the sample and spectral emission from the plume is analyzed using a set of synchronized spectrometers. We explore the use of LIBS to map the stoichiometry of compositionally graded amorphous indium zinc oxide thin-film libraries. After optimization of the experimental parameters (distance between lens and samples, spot size on the samples, etc.), the LIBS system was calibrated against inductively coupled plasma atomic emission spectroscopy which resulted in a very consistent LIBS-based elemental analysis. Various parameters that need to be watched closely in order to produce consistent results are discussed. We also compare LIBS and x-ray fluorescence as techniques for the compositional mapping of libraries.

• OSTI ID: 22053773
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 7 Vol. 81; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ABLATION
ALUMINIUM
DOPED MATERIALS
EMISSION SPECTROSCOPY
FLUORESCENCE
MAPPING
NEODYMIUM
OPTIMIZATION
PLASMA
PLUMES
SPECTROMETERS
STOICHIOMETRY
THIN FILMS
X RADIATION
YTTRIUM
ZINC OXIDES