A compact multipurpose nanomanipulator for use inside a scanning electron microscope

Journal Article · Mon Feb 15 04:00:00 EST 2010 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3271033· OSTI ID:22053640

Heeres, E C; Katan, A J; Es, M H. van; Beker, A F; Hesselberth, M; Zalm, D J. van der ^[1]; Oosterkamp, T H ^[1]

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1. Leiden Institute of Physics, Leiden University, Niels Bohrweg 2, 2333 CA Leiden (Netherlands)

A compact, two-stage nanomanipulator was designed and built for use inside a scanning electron microscope. It consists of a fine stage employing piezostacks that provide a 15 {mu}m range in three dimensions and a coarse stage based on commercially available stick-slip motors. Besides the fabrication of enhanced probes for scanning probe microscopy and the enhancement of electron field emitters, other novel manipulation processes were developed, such as locating, picking up, and positioning small nanostructures with an accuracy of {approx}10 nm. In combination with in situ I-V experiments, welding, and etching, this results in a multipurpose nanofactory, enabling a new range of experiments.

• OSTI ID: 22053640
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 81; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ACCURACY
ETCHING
MANIPULATORS
NANOSTRUCTURES
POSITIONING
PROBES
SCANNING ELECTRON MICROSCOPY
WELDING