Influence of annealing and Ag doping on structural and optical properties of indium tin oxide thin films

Journal Article · Fri Jan 15 04:00:00 EST 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3264478· OSTI ID:22053601

Chunbin, Cao; Lei, Xiao; Xueping, Song; Zhaoqi, Sun ^[1]

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1. School of Sciences, Anhui Agricultural University, Hefei 230036 (China)

Indium tin oxide (ITO) and Ag (1.2{+-}0.1 at. %)-ITO films with the thickness of 130 nm were deposited on glass substrates at room temperature by dc magnetron sputtering and postannealed at the temperature range of 200-400 deg. C. By calculating the x-ray diffraction data, the lattice constants of all samples were obtained and the results show that the annealing led to the smaller lattice constants and the Ag doping resulted in the further lattice distortion. The refractive index n and extinction coefficient k of all samples were extracted from the transmittance spectra by means of the spectroscopic ellipsometry optimization method. Ag-ITO film annealed at 400 deg. C has the high transmittance of 80%-90% in the visible wavelength range. Ag doping dramatically increased the extinction coefficient k of ITO films in UV wavelength range but almost without change in it in visible band. Meanwhile, by contrast with ITO films, Ag-ITO films show much higher n values than that of ITO films. Finally, the optical band gaps of all samples were determined, and it has been found that there is almost no difference of band gaps between ITO and Ag-ITO films. The reasons of the influence of annealing and Ag doping on structural and optical properties of ITO thin films are discussed.

• OSTI ID: 22053601
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 1 Vol. 28; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
DEPOSITION
ELLIPSOMETRY
ENERGY GAP
GLASS
INDIUM COMPOUNDS
LATTICE PARAMETERS
OPTIMIZATION
REFRACTIVE INDEX
SEMICONDUCTOR MATERIALS
SILVER
SPUTTERING
SUBSTRATES
THIN FILMS
TIN OXIDES
ULTRAVIOLET SPECTRA
VISIBLE SPECTRA
X-RAY DIFFRACTION