Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor

Journal Article · Wed Apr 15 00:00:00 EDT 2009 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3117462· OSTI ID:22053479

Kim, Yongdae; Park, Kyihwan ^[1]; Kim, Sangyoo ^[2]

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1. Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712 (Korea, Republic of)
2. Compressor Group, Digital Appliance Laboratory LG Electronics, Gaeumjeong-Dong, Changwon, Gyeongnam 641-711 (Korea, Republic of)

A six-axis active vibration isolation system (AVIS) is developed using voice coil actuators. Point contact configuration is employed to have an easy assembly of eight voice coil actuators to an upper and a base plates. The velocity sensor, using an electromagnetic principle that is commonly used in the vibration control, is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system using the atomic force microscope images.

• OSTI ID: 22053479
• Journal Information: Review of Scientific Instruments, Vol. 80, Issue 4; Other Information: (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ACTUATORS
ATOMIC FORCE MICROSCOPY
DAMPING
DEGREES OF FREEDOM
ELECTRIC CONTACTS
INSTABILITY
MAGNETIC FLUX
MECHANICAL VIBRATIONS
PERFORMANCE
VELOCITY