Angular distribution of atoms emitted from a SrZrO{sub 3} target by laser ablation under different laser fluences and oxygen pressures

Journal Article · Sat May 15 00:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3360905· OSTI ID:22051101

Konomi, I; Motohiro, T; Azuma, H; Asaoka, T; Nakazato, T; Sato, E; Shimizu, T; Fujioka, S; Sarukura, N; Nishimura, H ^[1]

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1. Toyota Technological Institute, 2-12-1 Hisakata, Tempaku-ku, Nagoya 468-8511, Japan and Toyota Central Research and Development Laboratories, Inc., 41-1 Yokomichi, Nagakute, Aichi 480-1192 (Japan)

Angular distributions of atoms emitted by laser ablation of perovskite-type oxide SrZrO{sub 3} have been investigated using electron probe microanalysis with wavelength-dispersive spectroscopy and charge-coupled device photography with an interference filter. Each constituent element has been analyzed as a two-modal distribution composed of a broad cos{sup m} {theta} distribution and a narrow cos{sup n} {theta} distribution. The exponent n characterizes the component of laser ablation while the exponent m characterizes that of thermal evaporation, where a larger n or m means a narrower angular distribution. In vacuum, O (n=6) showed a broader distribution than those of Sr (n=16) and Zr (n=17), and Sr{sup +} exhibited a spatial distribution similar to that of Sr. As the laser fluence was increased from 1.1 to 4.4 J/cm{sup 2}, the angular distribution of Sr became narrower. In the laser fluence range of 1.1-4.4 J/cm{sup 2}, broadening of the angular distribution of Sr was observed only at the fluence of 1.1 J/cm{sup 2} under the oxygen pressure of 10 Pa. Monte Carlo simulations were performed to estimate approximately the energy of emitted atoms, focusing on the broadening of the angular distribution under the oxygen pressure of 10 Pa. The energies of emitted atoms were estimated to be 1-20 eV for the laser fluence of 1.1 J/cm{sup 2}, and more than 100 eV for 2.2 and 4.4 J/cm{sup 2}.

• OSTI ID: 22051101
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 28, Issue 3; Other Information: (c) 2010 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
ABLATION
ANGULAR DISTRIBUTION
CHARGE-COUPLED DEVICES
ELECTRON MICROPROBE ANALYSIS
ELECTRON PROBES
EV RANGE
EVAPORATION
LASER BEAM MACHINING
MONTE CARLO METHOD
OXYGEN
PEROVSKITE
PHOTOGRAPHY
SPATIAL DISTRIBUTION
SPECTROSCOPY
STRONTIUM COMPOUNDS
ZIRCONATES