A laser interferometer for measuring straightness and its position based on heterodyne interferometry
- Nanometer Measurement Lab, Zhejiang Sci-tech University, Hangzhou 310018 (China)
- School of Science, Zhejiang Sci-tech University, Hangzhou 310018 (China)
- School of Science, Beijing Jiaotong University, Beijing 100044 (China)
Not only the magnitude but also the position of straightness errors are of concern to users. However, current laser interferometers used for measuring straightness seldom give the relative position of the straightness error. To solve this problem, a laser interferometer for measuring straightness and its position based on heterodyne interferometry is proposed. The optical configuration of the interferometer is designed and the measurement principle is analyzed theoretically. Two experiments were carried out. The first experiment verifies the validity and repeatability of the interferometer by measuring a linear stage. Also, the second one for measuring a flexure-hinge stage demonstrates that the interferometer is capable of nanometer measurement accuracy. These results show that this interferometer has advantages of simultaneously measuring straightness error and the relative position with high precision, and a compact structure.
- OSTI ID:
- 22051093
- Journal Information:
- Review of Scientific Instruments, Vol. 80, Issue 11; Other Information: (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Improved common-path fast-scanning heterodyne interferometer system as potential dense-plasma diagnostics
Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement