Development and performance test of a soft x-ray polarimeter and ellipsometer for complete polarization analysis
- Quantum Beam Science Directorate, Japan Atomic Energy Agency, 8-1-7, Umemidai, Kizugawa, Kyoto 619-0215 (Japan)
- Shimadzu Emit Co. Ltd., 2-5-23, Kitahama, Chuo-ku, Osaka 541-0041 (Japan)
A new apparatus for polarimetric and ellipsometric measurements based on the rotating-analyzer method in the soft x-ray region has been designed, constructed, and installed in the soft x-ray beamline (BL-11) at the SR Center of Ritsumeikan University, Shiga, Japan. It can realize the optical configurations for the complete polarization analysis by using six independently movable drive shafts. A demonstration of the capabilities of the apparatus has been performed using Mo/Si multilayer polarizers deposited by an ion beam sputtering method. It is for the first time shown that the degree of linear polarization of monochromatized light from the BL-11 is approximately 87% at 92 eV since the beamline has been constructed.
- OSTI ID:
- 22051028
- Journal Information:
- Review of Scientific Instruments, Vol. 80, Issue 8; Other Information: (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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