Growth of high-quality SrTiO{sub 3} films using a hybrid molecular beam epitaxy approach
- Materials Department, University of California, Santa Barbara, California 93106-5050 (United States)
A hybrid molecular beam epitaxy approach for atomic-layer controlled growth of high-quality SrTiO{sub 3} films with scalable growth rates was developed. The approach uses an effusion cell for Sr, a plasma source for oxygen, and a metal-organic source (titanium tetra isopropoxide) for Ti. SrTiO{sub 3} films were investigated as a function of cation flux ratio on (001) SrTiO{sub 3} and (LaAlO{sub 3}){sub 0.3}(Sr{sub 2}AlTaO{sub 6}){sub 0.7} (LSAT) substrates. Growth conditions for stoichiometric insulating films were identified. Persistent (>180 oscillations) reflection high-energy electron diffraction oscillation characteristic of layer-by-layer growth were observed. The full widths at half maximum of x-ray diffraction rocking curves were similar to those of the substrates, i.e., 34 arc sec on LSAT. The film surfaces were nearly ideal with root mean square surface roughness values of less than 0.1 nm. The relationship between surface reconstructions, growth modes, and stoichiometry is discussed.
- OSTI ID:
- 22050984
- Journal Information:
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 3 Vol. 27; ISSN 1553-1813
- Country of Publication:
- United States
- Language:
- English
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