A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere

Journal Article · Sun Jan 15 04:00:00 EST 2012 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.3676598· OSTI ID:22043548

Punjabi, Sangeeta B ^[1]; Joshi, N K ^[2]; Mangalvedekar, H A; Lande, B K ^[1]; Das, A K ^[3]; Kothari, D C ^[4]

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1. Electrical Engineering Department, V. J.T.I, Matunga, Mumbai 400019 (India)
2. Faculty of Engineering and technology, MITS, lakshmangarh, (Sikar), Rajasthan 332311 (India)
3. Laser and Plasma Technology Division, BARC, Mumbai 400085 (India)
4. Department of Physics, University of Mumbai, Kalina, Santacruz(E) 400098 (India)

A numerical study is done to understand the possible operating regimes of RF-ICP torch (3 MHz, 50 kW) using different gases for plasma formation at atmospheric pressure. A two dimensional numerical simulation of RF-ICP torch using argon, nitrogen, oxygen, and air as plasma gas has been investigated using computational fluid dynamic (CFD) software fluent{sup (c)}. The operating parameters varied here are central gas flow, sheath gas flow, RF-power dissipated in plasma, and plasma gas. The temperature contours, flow field, axial, and radial velocity profiles were investigated under different operating conditions. The plasma resistance, inductance of the torch, and the heat distribution for various plasma gases have also been investigated. The plasma impedance of ICP torch varies with different operating parameters and plays an important role for RF oscillator design and power coupling. These studies will be useful to decide the design criteria for ICP torches required for different material processing applications.

• OSTI ID: 22043548
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 1 Vol. 19; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AIR
ARGON
ATMOSPHERIC PRESSURE
COMPUTERIZED SIMULATION
DESIGN
ELECTRON TEMPERATURE
FLUID MECHANICS
GAS FLOW
IMPEDANCE
ION TEMPERATURE
NITROGEN
NUMERICAL ANALYSIS
OSCILLATORS
OXYGEN
PLASMA
PLASMA SHEATH
PLASMA SIMULATION
RADIAL VELOCITY
TWO-DIMENSIONAL CALCULATIONS