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Columnar grain growth of FePt(L1{sub 0}) thin films

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3679463· OSTI ID:22038923
;  [1];  [1];  [1]
  1. Data Storage Systems Center, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213 (United States)
An experimental approach for obtaining perpendicular FePt-SiOx thin films with a large height to diameter ratio FePt(L1{sub 0}) columnar grains is presented in this work. The microstructure for FePt-SiOx composite thin films as a function of oxide volume fraction, substrate temperature, and film thickness is studied by plan view and cross section TEM. The relations between processing, microstructure, epitaxial texture, and magnetic properties are discussed. By tuning the thickness of the magnetic layer and the volume fraction of oxide in the film at a sputtering temperature of 410 deg. C, a 16 nm thick perpendicular FePt film with {approx}8 nm diameter of FePt grains was obtained. The height to diameter ratio of the FePt grains was as large as 2. Ordering at lower temperature can be achieved by introducing a Ag sacrificial layer.
OSTI ID:
22038923
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 7 Vol. 111; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English