Self-organization and self-limitation in high power impulse magnetron sputtering
- Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)
The plasma over the racetrack in high power impulse magnetron sputtering develops in traveling ionization zones. Power densities can locally reach 10{sup 9} W/m{sup 2}, which is much higher than usually reported. Ionization zones move because ions are 'evacuated' by the electric field, exposing neutrals to magnetically confined, drifting electrons. Drifting secondary electrons amplify ionization of the same ionization zone where the primary ions came from, while sputtered and outgassing atoms are supplied to the following zone(s). Strong density gradients parallel to the target disrupt electron confinement: a negative feedback mechanism that stabilizes ionization runaway.
- OSTI ID:
- 22025579
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 22 Vol. 100; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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