Self-organization and self-limitation in high power impulse magnetron sputtering

Journal Article · Mon May 28 00:00:00 EDT 2012 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4724205· OSTI ID:22025579

Anders, Andre ^[1]

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1. Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)

The plasma over the racetrack in high power impulse magnetron sputtering develops in traveling ionization zones. Power densities can locally reach 10{sup 9} W/m{sup 2}, which is much higher than usually reported. Ionization zones move because ions are 'evacuated' by the electric field, exposing neutrals to magnetically confined, drifting electrons. Drifting secondary electrons amplify ionization of the same ionization zone where the primary ions came from, while sputtered and outgassing atoms are supplied to the following zone(s). Strong density gradients parallel to the target disrupt electron confinement: a negative feedback mechanism that stabilizes ionization runaway.

• OSTI ID: 22025579
• Journal Information: Applied Physics Letters, Vol. 100, Issue 22; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DEPOSITION
ELECTRIC FIELDS
ELECTRONS
FEEDBACK
IONIZATION
IONS
MAGNETIC CONFINEMENT
MAGNETRONS
PLASMA
PLASMA DENSITY
POWER DENSITY
PULSES
SPUTTERING
WALL EFFECTS