Fabrication technology of heterojunctions in the lattice of a 2D photonic crystal based on macroporous silicon

Journal Article · Mon Aug 15 00:00:00 EDT 2011 · Semiconductors

DOI:https://doi.org/10.1134/S1063782611080239· OSTI ID:22004750

Fedulova, G V; Astrova, E V ^[1]; Baldycheva, A V ^[2]; Tolmachev, V A ^[1]; Perova, T S ^[2]

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1. Russian Academy of Sciences, Ioffe Physical Technical Institute (Russian Federation)
2. University of Dublin, Trinity College, Department of Electronic and Electrical Engineering (Ireland)

Design and fabrication technology of a microcavity structure based on a double heterojunction in macroporous silicon is suggested. The fabrication process of a strip of a 2D photonic crystal constituted by a finite number of lattice periods and the technique for defect formation by local opening of macropores on the substrate side, followed by filling of these macropores with a nematic liquid crystal, are considered.

• OSTI ID: 22004750
• Journal Information: Semiconductors, Vol. 45, Issue 8; Other Information: Copyright (c) 2011 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7826
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DEFECTS
FABRICATION
HETEROJUNCTIONS
LIQUID CRYSTALS
SILICON
SUBSTRATES