Microcantilever sensors

Conference · Mon Apr 01 00:00:00 EST 1996

OSTI ID:217654

Thundat, T; Warmack, R J ^[1]; Oden, P I ^[1]; Dasktos, P G; Chen, G Y ^[1]

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1. Oak Ridge National Lab., TN (United States)

Novel sensors based on bending and resonance frequency changes of (coated silicon) microcantilevers are discussed. Adsorption-induced resonance frequency changes of microcantilevers can be due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending due to adsorption-induced differential surface stress if the adsorption is confined to one surface. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemcal sensors.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC05-96OR22464
• OSTI ID: 217654
• Report Number(s): CONF-960165-1; ON: DE96008678
• Resource Relation: Conference: 16. Werner Brandt workshop on charged particle penetration phenonema, Oak Ridge, TN (United States), 7-9 Jan 1996; Other Information: PBD: [1996]
• Country of Publication: United States
• Language: English

Related Subjects

40 CHEMISTRY
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
CHEMICAL ANALYSIS
MEASURING INSTRUMENTS
ADSORPTION
MINIATURIZATION
BENDING
RESONANCE
SPRINGS
SILICON
COATINGS