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Microcantilever sensors

Conference ·
OSTI ID:217654

Novel sensors based on bending and resonance frequency changes of (coated silicon) microcantilevers are discussed. Adsorption-induced resonance frequency changes of microcantilevers can be due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending due to adsorption-induced differential surface stress if the adsorption is confined to one surface. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemcal sensors.

Research Organization:
Oak Ridge National Lab., TN (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC05-96OR22464
OSTI ID:
217654
Report Number(s):
CONF-960165--1; ON: DE96008678
Country of Publication:
United States
Language:
English

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