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Title: Microcantilever sensors

Abstract

Novel sensors based on bending and resonance frequency changes of (coated silicon) microcantilevers are discussed. Adsorption-induced resonance frequency changes of microcantilevers can be due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending due to adsorption-induced differential surface stress if the adsorption is confined to one surface. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemcal sensors.

Authors:
;  [1];  [1]; ;  [1]
  1. Oak Ridge National Lab., TN (United States)
Publication Date:
Research Org.:
Oak Ridge National Lab., TN (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
217654
Report Number(s):
CONF-960165-1
ON: DE96008678
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Conference
Resource Relation:
Conference: 16. Werner Brandt workshop on charged particle penetration phenonema, Oak Ridge, TN (United States), 7-9 Jan 1996; Other Information: PBD: [1996]
Country of Publication:
United States
Language:
English
Subject:
40 CHEMISTRY; 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; CHEMICAL ANALYSIS; MEASURING INSTRUMENTS; ADSORPTION; MINIATURIZATION; BENDING; RESONANCE; SPRINGS; SILICON; COATINGS

Citation Formats

Thundat, T, Warmack, R J, Oden, P I, Oak Ridge Associated Universities, Inc., TN, Dasktos, P G, Chen, G Y, and Tennessee Univ., Knoxville, TN. Microcantilever sensors. United States: N. p., 1996. Web.
Thundat, T, Warmack, R J, Oden, P I, Oak Ridge Associated Universities, Inc., TN, Dasktos, P G, Chen, G Y, & Tennessee Univ., Knoxville, TN. Microcantilever sensors. United States.
Thundat, T, Warmack, R J, Oden, P I, Oak Ridge Associated Universities, Inc., TN, Dasktos, P G, Chen, G Y, and Tennessee Univ., Knoxville, TN. Mon . "Microcantilever sensors". United States. https://www.osti.gov/servlets/purl/217654.
@article{osti_217654,
title = {Microcantilever sensors},
author = {Thundat, T and Warmack, R J and Oden, P I and Oak Ridge Associated Universities, Inc., TN and Dasktos, P G and Chen, G Y and Tennessee Univ., Knoxville, TN},
abstractNote = {Novel sensors based on bending and resonance frequency changes of (coated silicon) microcantilevers are discussed. Adsorption-induced resonance frequency changes of microcantilevers can be due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending due to adsorption-induced differential surface stress if the adsorption is confined to one surface. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemcal sensors.},
doi = {},
url = {https://www.osti.gov/biblio/217654}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {4}
}

Conference:
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