Nanoindentation Studies Of Hard Nanocomposite Ti-B-N Thin Films
Journal Article
·
· AIP Conference Proceedings
- Non Ferrous Materials Technology Development Center, Kanchanbagh, Hyderabad (India)
- Department of Metallurgy and Materials Science, Jadavpur University, Kolkata (India)
- National Metallurgical Laboratory, Jamshedpur India (India)
Titanium boron nitride (Ti-B-N) films were deposited by reactive magnetron sputtering using single Titanium diboride (TiB{sub 2}) target in different Ar-N{sub 2} gas mixtures. The influence of N{sub 2}:Ar ratio on the microstructure and mechanical properties of the deposited films have been investigated. Atomic force microscopy analysis indicated the grain size decreases with incorporation of nitrogen in the films. Nanoindentation studies have shown the hardness decreases with nitrogen incorporation.
- OSTI ID:
- 21612351
- Journal Information:
- AIP Conference Proceedings, Vol. 1393, Issue 1; Conference: ICACNM-2011: International conference on advances in condensed and nano materials, Chandigarh (India), 23-26 Feb 2011; Other Information: DOI: 10.1063/1.3653698; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
77 NANOSCIENCE AND NANOTECHNOLOGY
ATOMIC FORCE MICROSCOPY
BORON NITRIDES
COMPOSITE MATERIALS
GRAIN SIZE
HARDNESS
MIXTURES
NANOSTRUCTURES
NITROGEN
PHASE DIAGRAMS
SPUTTERING
THIN FILMS
TITANIUM
TITANIUM BORIDES
X-RAY DIFFRACTION
BORIDES
BORON COMPOUNDS
COHERENT SCATTERING
DIAGRAMS
DIFFRACTION
DISPERSIONS
ELEMENTS
FILMS
INFORMATION
MATERIALS
MECHANICAL PROPERTIES
METALS
MICROSCOPY
MICROSTRUCTURE
NITRIDES
NITROGEN COMPOUNDS
NONMETALS
PNICTIDES
SCATTERING
SIZE
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
77 NANOSCIENCE AND NANOTECHNOLOGY
ATOMIC FORCE MICROSCOPY
BORON NITRIDES
COMPOSITE MATERIALS
GRAIN SIZE
HARDNESS
MIXTURES
NANOSTRUCTURES
NITROGEN
PHASE DIAGRAMS
SPUTTERING
THIN FILMS
TITANIUM
TITANIUM BORIDES
X-RAY DIFFRACTION
BORIDES
BORON COMPOUNDS
COHERENT SCATTERING
DIAGRAMS
DIFFRACTION
DISPERSIONS
ELEMENTS
FILMS
INFORMATION
MATERIALS
MECHANICAL PROPERTIES
METALS
MICROSCOPY
MICROSTRUCTURE
NITRIDES
NITROGEN COMPOUNDS
NONMETALS
PNICTIDES
SCATTERING
SIZE
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS