Aplanatic Three-Mirror Objective for High-Magnification Soft X-Ray Microscopy

Journal Article · Fri Sep 09 00:00:00 EDT 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3625333· OSTI ID:21608278

Toyoda, M; Jinno, T; Yanagihara, M ^[1]

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1. Laboratory of Soft X-Ray Microscopy, Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai, Miyagi, 980-8577 (Japan)

An innovative solution for high-magnification microscopy, based on attaching afocal optics for focal length reduction, is proposed. The solution, consisting of three spherical mirrors, allows one to enhance a magnification of a laboratory based soft x-ray microscope over 1000x, where movies with diffraction-limited resolution can be observed with an x-ray CCD. The design example, having a numerical aperture of 0.25, was successfully demonstrated both a high magnification and a large field of view.

• OSTI ID: 21608278
• Journal Information: AIP Conference Proceedings, Vol. 1365, Issue 1; Conference: 10. international conference on X-ray microscopy, Chicago, IL (United States), 15-20 Aug 2010; Other Information: DOI: 10.1063/1.3625333; (c) 2011 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
07 ISOTOPES AND RADIATION SOURCES
APERTURES
BEAM OPTICS
BEAM TRANSPORT
CHARGE-COUPLED DEVICES
DESIGN
IMAGE PROCESSING
MATHEMATICAL SOLUTIONS
MICROSCOPY
MIRRORS
OPTICS
PHOTON BEAMS
RESOLUTION
SOFT X RADIATION
SPHERICAL CONFIGURATION
X-RAY DIFFRACTION
BEAMS
COHERENT SCATTERING
CONFIGURATION
DIFFRACTION
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
OPENINGS
PROCESSING
RADIATIONS
SCATTERING
SEMICONDUCTOR DEVICES
X RADIATION