Deposition of thin Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} films by pulsed laser ablation

Journal Article · Thu Apr 15 00:00:00 EDT 2010 · Semiconductors

DOI:https://doi.org/10.1134/S1063782610040238· OSTI ID:21562310

Virt, I S; Shkumbatyuk, T P ^[1]; Kurilo, I V; Rudyi, I O; Lopatinskyi, T Ye ^[2]; Linnik, L F; Phedorov, A G ^[3]

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1. Drogobych State Pedagogical University (Ukraine)
2. Lvivska Politekhnika National University (Ukraine)
3. National Academy of Sciences of Ukraine, Institute of Single Crystals (Ukraine)

Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} films were obtained by pulsed laser ablation. The films were deposited in vacuum (1 x 10{sup -5} Torr) on single crystal substrates of Al{sub 2}O{sub 3} (0001), BaF{sub 2} (111), and fresh cleavages of KCl or NaCl (001) heated to 453-523 K. The films were 10-1500 nm thick. The structures of the bulk material of targets and films were studied by X-ray diffractometry and transmission high-energy electron diffraction, respectively. Electrical properties of the films were measured in the temperature range of 77-300 K. It is shown that the films possess semiconductor properties. Several activation portions are observed in the temperature dependences of resistivity; the energies of activation portions depend on the film thickness and crystallite size.

• OSTI ID: 21562310
• Journal Information: Semiconductors, Vol. 44, Issue 4; Other Information: DOI: 10.1134/S1063782610040238; Copyright (c) 2010 Pleiades Publishing, Ltd.; ISSN 1063-7826
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABLATION
ALUMINIUM OXIDES
ANTIMONY TELLURIDES
BARIUM FLUORIDES
BISMUTH TELLURIDES
CLEAVAGE
DEPOSITION
ELECTRICAL PROPERTIES
ELECTRON DIFFRACTION
FILMS
LASERS
MONOCRYSTALS
POTASSIUM CHLORIDES
SEMICONDUCTOR MATERIALS
SODIUM CHLORIDES
SUBSTRATES
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE
THICKNESS
X-RAY DIFFRACTION
ALKALI METAL COMPOUNDS
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ANTIMONY COMPOUNDS
BARIUM COMPOUNDS
BISMUTH COMPOUNDS
CHALCOGENIDES
CHLORIDES
CHLORINE COMPOUNDS
COHERENT SCATTERING
CRYSTALS
DIFFRACTION
DIMENSIONS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
MATERIALS
MICROSTRUCTURE
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POTASSIUM COMPOUNDS
SCATTERING
SODIUM COMPOUNDS
TELLURIDES
TELLURIUM COMPOUNDS