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Title: Tuneable magnetic patterning of paramagnetic Fe{sub 60}Al{sub 40} (at. %) by consecutive ion irradiation through pre-lithographed shadow masks

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3590158· OSTI ID:21560232
; ;  [1];  [2]; ;  [3]; ;  [4];  [5];  [6];  [7];  [8];  [9]
  1. Departament de Fisica, Universitat Autonoma de Barcelona, 08193 Bellaterra (Spain)
  2. Instituut voor Kern- en Stralingsfysica and INPAC, Katholieke Universiteit Leuven, Celestijnenlaan 200 D, BE-3001 Leuven (Belgium)
  3. Institut de Microelectronica de Barcelona (IMB-CNM), CSIC, Campus Universitat Autonoma Barcelona, E-08193, Bellaterra (Spain)
  4. Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen PSI (Switzerland)
  5. Research Center, Philip Morris USA, Inc., 4201 Commerce Road, Richmond, Virginia 23234 (United States)
  6. Department of Materials Science and Engineering, Royal Institute of Technology, S-10044, Stockholm (Sweden)
  7. Department of Physics, Colorado State University, Fort Collins, Colorado 80523 (United States)
  8. Institucio Catalana de Recerca i Estudis Avancats (ICREA) and CIN2 (ICN-CSIC) and Universitat Autonoma de Barcelona, Catalan Institute of Nanotechnology, Campus de la UAB, E-08193 Bellaterra (Spain)
  9. Institucio Catalana de Recerca i Estudis Avancats (ICREA) and Departament de Fisica, Universitat Autonoma de Barcelona, E-08193 Bellaterra (Spain)

Arrays of ferromagnetic circular dots (with diameters ranging from 225 to 420 nm) have been prepared at the surface of atomically ordered paramagnetic Fe{sub 60}Al{sub 40} (at. %) sheets by means of ion irradiation through prelithographed poly(methyl methacrylate) (PMMA) masks. The cumulative effects of consecutive ion irradiation (using Ar{sup +} ions at 1.2 x 10{sup 14} ions/cm{sup 2} with 10, 13, 16, 19 and 22 keV incident energies) on the properties of the patterned dots have been investigated. A progressive increase in the overall magneto-optical Kerr signal is observed for increasingly larger irradiation energies, an effect which is ascribed to accumulation of atomic disorder. Conversely, the coercivity, H{sub C}, shows a maximum after irradiating at 16-19 keV and it decreases for larger irradiation energies. Such a decrease in H{sub C} is ascribed to the formation of vortex states during magnetization reversal, in agreement with results obtained from micromagnetic simulations. At the same time, the PMMA layer, with an initial thickness of 90 nm, becomes progressively thinned during the successive irradiation processes. After irradiation at 22 keV, the remaining PMMA layer is too thin to stop the incoming ions and, consequently, ferromagnetism starts to be generated underneath the nominally masked areas. These experimental results are in agreement with calculations using the Monte-Carlo simulation Stopping Range of Ions in Matter software, which show that for exceedingly thin PMMA layers Ar{sup +} ions can reach the Fe{sub 60}Al{sub 40} layer despite the presence of the mask.

OSTI ID:
21560232
Journal Information:
Journal of Applied Physics, Vol. 109, Issue 9; Other Information: DOI: 10.1063/1.3590158; (c) 2011 American Institute of Physics; ISSN 0021-8979
Country of Publication:
United States
Language:
English