Particle-in-cell simulation of ion energy distributions on an electrode by applying tailored bias waveforms in the afterglow of a pulsed plasma
- Plasma Processing Laboratory, Department of Chemical and Biomolecular Engineering, University of Houston, Houston, Texas 77204-4004 (United States)
A Particle-in-Cell simulation with Monte Carlo Collisions (PIC-MCC) was conducted of the application of tailored DC voltage steps on an electrode, during the afterglow of a capacitively-coupled pulsed-plasma argon discharge, to control the energy of ions incident on the counter-electrode. Staircase voltage waveforms with selected amplitudes and durations resulted in ion energy distributions (IED) with distinct narrow peaks, with controlled energies and fraction of ions under each peak. Temporary electron heating at the moment of application of a DC voltage step did not influence the electron density decay in the afterglow. The IED peaks were 'smeared' by collisions, especially at the higher pressures of the range (10-40 mTorr) investigated.
- OSTI ID:
- 21560164
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 109; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Tailored ion energy distributions on plasma electrodes
Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AFTERGLOW
ARGON
CALCULATION METHODS
COLLISIONS
COMPUTERIZED SIMULATION
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRODES
ELECTRON DENSITY
ELECTRON TEMPERATURE
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
ENERGY SPECTRA
FERMIONS
FLUIDS
GASES
HEATING
HIGH-FREQUENCY DISCHARGES
ION TEMPERATURE
LEPTONS
MONTE CARLO METHOD
NONMETALS
PLASMA
PLASMA SIMULATION
RARE GASES
SIMULATION
SPECTRA
WAVE FORMS