Dielectric properties of aluminum silver alloy thin films in optical frequency range

Journal Article · Wed Jun 15 00:00:00 EDT 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3592971· OSTI ID:21538427

Guang, Yang; Jingbo, Sun; Ji, Zhou

The dielectric properties of direct current (dc) magnetron sputtering aluminum silver alloy films in optical frequency have been quantitatively studied by variable angle spectroscopic ellipsometry. The structure and surface topography of the alloy films were characterized using scanning probe microscopy and x-ray diffraction. The Drude-Lorentz model was used to simulate the dielectric function of Al-Ag alloy films. Meanwhile, the effective medium theory has been utilized for the treatment of surface roughness. We found that the interband transition around 1.5 eV can be shifted through a variable annealing temperature and a changeable silver percentage of Al-Ag alloys.

• OSTI ID: 21538427
• Journal Information: Journal of Applied Physics, Vol. 109, Issue 12; Other Information: DOI: 10.1063/1.3592971; (c) 2011 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM ALLOYS
ANNEALING
DIELECTRIC MATERIALS
DIRECT CURRENT
EFFICIENCY
ELLIPSOMETRY
ENERGY-LEVEL TRANSITIONS
FREQUENCY RANGE
MAGNETRONS
PERMITTIVITY
ROUGHNESS
SILVER ALLOYS
SIMULATION
SPUTTERING
SURFACES
THIN FILMS
X-RAY DIFFRACTION
ALLOYS
COHERENT SCATTERING
CURRENTS
DIELECTRIC PROPERTIES
DIFFRACTION
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
HEAT TREATMENTS
MATERIALS
MEASURING METHODS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
PHYSICAL PROPERTIES
SCATTERING
SURFACE PROPERTIES
TRANSITION ELEMENT ALLOYS