Spectroscopic ellipsometric analysis of ZnSe{sub 1-x}O{sub x} layers with different O compositions

Journal Article · Mon Nov 15 04:00:00 EST 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3511439· OSTI ID:21537922

Uma, Kasimayan ^[1]; Chen, Cheng-Yu ^[2]; Chao, Chih-Kang; Wu, Chih-Hung ^[3]; Chyi, Jen-Inn ^[1]

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1. Department of Electrical Engineering, National Central University, Jhongli, 32001 Taiwan (China)
2. Department of Optics and Photonics, National Central University, Jhongli, 32001 Taiwan (China)
3. Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, Longtan, 32546 Taiwan (China)

In this study, ZnSe{sub 1-x}O{sub x} layers with oxygen contents of up to 7.0% are successfully grown at 300 deg. C on semi-insulating GaAs substrates by molecular beam epitaxy. The deposited ZnSe{sub 1-x}O{sub x} films are characterized by Raman spectroscopy and the optical properties studied by spectroscopic ellipsometry. We examine the complex dielectric function obtained by spectroscopic ellipsometry in the photon range from 1.5 to 5 eV. The shifting and broadening of the critical points in the ZnSe{sub 1-x}O{sub x} epilayers as a function of the O composition are investigated for the first time. The characteristics of the peaks change as the O composition increases. The second derivative of the dielectric function is presented and analyzed. The dielectric function spectra reveal distinct structures which can be attributed to the band gap and optical transitions at higher energy.

• OSTI ID: 21537922
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 108; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARSENIC COMPOUNDS
ARSENIDES
BOSONS
CRYSTAL GROWTH METHODS
DIELECTRIC MATERIALS
ELEMENTARY PARTICLES
ELEMENTS
ELLIPSOMETRY
ENERGY GAP
EPITAXY
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
LASER SPECTROSCOPY
LAYERS
MASSLESS PARTICLES
MATERIALS
MEASURING METHODS
MOLECULAR BEAM EPITAXY
NONMETALS
OPTICAL PROPERTIES
OXYGEN
OXYGEN COMPOUNDS
PEAKS
PHOTONS
PHYSICAL PROPERTIES
PNICTIDES
RAMAN SPECTRA
RAMAN SPECTROSCOPY
SELENIUM COMPOUNDS
SEMICONDUCTOR MATERIALS
SPECTRA
SPECTROSCOPY
SUBSTRATES
ZINC COMPOUNDS