Laser induced extraplanar propulsion for three-dimensional microfabrication

Journal Article · Mon Mar 28 00:00:00 EDT 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3567763· OSTI ID:21518364

Birnbaum, A J; Pique, A ^[1]

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1. Materials Science and Technology Division, Code 6364, Naval Research Laboratory, Washington, DC 20375 (United States)

The laser induced extraplanar propulsion process is presented for the creation of controllable three-dimensional deformation of on-substrate components. It is demonstrated that the process is compatible with transparent substrates and ductile materials and is highly controllable in terms of the desired deformation via the adjustment of incident laser energy density. Copper films with thicknesses varying from 0.1-1 {mu}m are deformed over bending angles ranging from 0 deg. - 180 deg. A 355 nm laser at fluences ranging from 10-40 mJ/cm{sup 2} is used in conjunction with an indium-tin-oxide propulsion layer to demonstrate the process. Characterization is performed via electron and laser confocal microscopy.

• OSTI ID: 21518364
• Journal Information: Applied Physics Letters, Vol. 98, Issue 13; Other Information: DOI: 10.1063/1.3567763; (c) 2011 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BENDING
COPPER
DEFORMATION
ELECTRON MICROSCOPY
ELECTRONS
ENERGY DENSITY
INDIUM COMPOUNDS
LASER MATERIALS
LASER RADIATION
LAYERS
OPTICAL MICROSCOPY
OXIDES
PROPULSION
SUBSTRATES
THICKNESS
THIN FILMS
THREE-DIMENSIONAL CALCULATIONS
TIN COMPOUNDS
TIN OXIDES
CHALCOGENIDES
DIMENSIONS
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
FILMS
LEPTONS
MATERIALS
METALS
MICROSCOPY
OXYGEN COMPOUNDS
RADIATIONS
TRANSITION ELEMENTS