Integration Of SIMS Into A General Purpose IBA Data Analysis Code

Journal Article · Wed Jun 01 00:00:00 EDT 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3586104· OSTI ID:21513366

Barradas, N P; Alves, E; Alves, L C ^[1]; Likonen, J; Hakola, A ^[2]; Coad, P; Widdowson, A ^[3]

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1. Instituto Tecnologico e Nuclear, E.N. 10, Sacavem 2686-953 (Portugal)
2. Association Euratom-TEKES, VTT, PO box 1000, 02044 VTT, Espoo (Finland)
3. Euratom/CCFE Fusion Association, Culham Science Centre, OX14 3DB (United Kingdom)

IBA techniques such as RBS, ERDA, NRA, or PIXE are highly complementary, and are often combined to maximize the extracted information. In particular, they have different sensitivities to various elements and probe different depth scales. The same is true for secondary ion mass spectrometry (SIMS), that can have much better detection limits for many species. Quantification of SIMS data normally requires careful calibration of the exact system being studied, and often the results are only semi-quantitative. Nevertheless, when SIMS is used together with other IBA techniques, it would be highly desirable to integrate the data analysis. We developed a routine to analyse SIMS data, and implemented it in NDF, a standard IBA data analysis code, that already supported RBS, ERDA, resonant and non-resonant NRA, and PIXE. Details of this new routine are presented in this work.

• OSTI ID: 21513366
• Journal Information: AIP Conference Proceedings, Vol. 1336, Issue 1; Conference: CAARI 2010: 21. International Conference on the Application of Accelerators in Research and Industry, Fort Worth, TX (United States), 8-13 Aug 2010; Other Information: DOI: 10.1063/1.3586104; (c) 2011 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
CALIBRATION
CARBON
DATA ANALYSIS
EQUIPMENT
ION MICROPROBE ANALYSIS
IONS
MASS SPECTROSCOPY
NUCLEAR REACTION ANALYSIS
PIXE ANALYSIS
PROBES
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SENSITIVITY
TOKAMAK DEVICES
CHARGED PARTICLES
CHEMICAL ANALYSIS
CLOSED PLASMA DEVICES
ELEMENTS
MICROANALYSIS
NONDESTRUCTIVE ANALYSIS
NONMETALS
SPECTROSCOPY
THERMONUCLEAR DEVICES
X-RAY EMISSION ANALYSIS