Effects of Laser Wavelength and Fluence in Pulsed Laser Deposition of Ge Films

Journal Article · Wed Mar 30 00:00:00 EDT 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3573761· OSTI ID:21511552

Yap, Seong Shan; Reenaas, Turid Worren ^[1]; Siew, Wee Ong; Tou, Teck Yong ^[2]; Ladam, Cecile ^[3]

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1. Department of Physics, Norwegian University of Science and Technology, 7491 Trondheim (Norway)
2. Faculty of Engineering, Multimedia University, 63100 Cyberjaya, Selangor (Malaysia)
3. SINTEF Materials and Chemistry, 7465 Trondheim (Norway)

Nanosecond lasers with ultra-violet, visible and infrared wavelengths: KrF (248 nm, 25 ns) and Nd:YAG (1064 nm, 532 nm, 355 nm, 5 ns) were used to ablate polycrystalline Ge target and deposit Ge films in vacuum (<10-6 Torr). Time-integrated optical emission spectra were obtained for laser fluence from 0.5-10 J/cm{sup 2}. Neutrals and ionized Ge species in the plasma plume were detected by optical emission spectroscopy. Ge neutrals dominated the plasma plume at low laser fluence while Ge{sup +} ions above some threshold fluence. The deposited amorphous thin-film samples consisted of particulates of size from nano to micron. The relation of the film properties and plume species at different laser fluence and wavelengths were discussed.

• OSTI ID: 21511552
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1328; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHARGED PARTICLES
CRYSTALS
DEPOSITION
ELECTROMAGNETIC RADIATION
EMISSION
EMISSION SPECTRA
EMISSION SPECTROSCOPY
ENERGY BEAM DEPOSITION
EXCIMER LASERS
FILMS
GAS LASERS
GERMANIUM IONS
IONS
IRRADIATION
KRYPTON FLUORIDE LASERS
LASER RADIATION
LASERS
LUMINESCENCE
MAGNETIC MATERIALS
MATERIALS
NEODYMIUM LASERS
PHOTON EMISSION
PLASMA
PLUMES
POLYCRYSTALS
PULSED IRRADIATION
RADIATIONS
SOLID STATE LASERS
SPECTRA
SPECTROSCOPY
SURFACE COATING
THIN FILMS
ULTRAVIOLET RADIATION
VISIBLE RADIATION
WAVELENGTHS