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Title: High-resolution projection image reconstruction of thick objects by hard x-ray diffraction microscopy

Journal Article · · Physical Review. B, Condensed Matter and Materials Physics
 [1];  [2];  [3];  [4];  [5];  [3];  [6]
  1. Frontier Research Base for Global Young Researchers, Frontier Research Center, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. Research Institute for Electronic Science, Hokkaido University, Sapporo 001-0021 (Japan)
  3. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  4. Research Center for Ultra-precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  5. Department of Materials Science and Engineering, Kyoto University, Yoshida, Sakyo, Kyoto 606-8501 (Japan)
  6. RIKEN SPring-8 Center, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148 (Japan)

Hard x-ray diffraction microscopy enables us to observe thick objects at high spatial resolution. The resolution of this method is limited, in principle, by only the x-ray wavelength and the largest scattering angle recorded. As the resolution approaches the wavelength, the thickness effect of objects plays a significant role in x-ray diffraction microscopy. In this paper, we report high-resolution hard x-ray diffraction microscopy for thick objects. We used highly focused coherent x rays with a wavelength of {approx}0.1 nm as an incident beam and measured the diffraction patterns of a {approx}150-nm-thick silver nanocube at the scattering angle of {approx}3 deg. We observed a characteristic contrast of the coherent diffraction pattern due to only the thickness effect and collected the diffraction patterns at nine incident angles so as to obtain information on a cross section of Fourier space. We reconstructed a pure projection image by the iterative phasing method from the patched diffraction pattern. The edge resolution of the reconstructed image was {approx}2 nm, which was the highest resolution so far achieved by x-ray microscopy. The present study provides us with a method for quantitatively observing thick samples at high resolution by hard x-ray diffraction microscopy.

OSTI ID:
21502903
Journal Information:
Physical Review. B, Condensed Matter and Materials Physics, Vol. 82, Issue 21; Other Information: DOI: 10.1103/PhysRevB.82.214102; (c) 2010 The American Physical Society; ISSN 1098-0121
Country of Publication:
United States
Language:
English