Plasma diagnostics for investigating extreme ultraviolet light sources

Journal Article · Mon Nov 15 04:00:00 EST 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3486220· OSTI ID:21483629

Yeates, P ^[1]; White, J ^[2]; Kennedy, E T ^[3]

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1. National Centre for Plasma Science and Technology (NCPST), Dublin City University, Glasnevin, Dublin, Leinster 01 (Ireland)
2. School of Physics, UCD, Belfield (Ireland)
3. School of Physical Sciences, Dublin City University, Glasnevin, Dublin, Leinster 01 (Ireland)

Plasma temperature and density diagnostics are crucial for lithographic applications of extreme ultraviolet light sources. One widely used technique employs line intensity ratios of successively charged ion states to determine the ion temperature (T{sub ionz}). This work comprises a detailed ''stress-test'' of the applied technique, where space and time resolved emission in laser-produced plasmas were studied, using a Nd:yttrium aluminum garnet laser pulse incident on an aluminum target in the 26.5-32.5 nm range. Detailed hydrodynamic simulations also investigate the dependency of ion temperature on electron density and the charge states for various line combinations (Al VI/V, Al VII/VI, Al VIII/VII, Al IX/VIII, and Al X/IX).

• OSTI ID: 21483629
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 9 Vol. 108; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM IONS
CHARGE STATES
CHARGED PARTICLES
COMPUTERIZED SIMULATION
ELECTROMAGNETIC RADIATION
ELECTRON DENSITY
ELECTRON TEMPERATURE
EXTREME ULTRAVIOLET RADIATION
ION TEMPERATURE
IONS
LASER-PRODUCED PLASMA
LASERS
LIGHT SOURCES
MULTICHARGED IONS
NEODYMIUM LASERS
PLASMA
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA PRODUCTION
PLASMA SIMULATION
PULSES
RADIATION SOURCES
RADIATIONS
RESOLUTION
SIMULATION
SOLID STATE LASERS
STRESSES
TIME RESOLUTION
TIMING PROPERTIES
ULTRAVIOLET RADIATION