Effects of off-stoichiometry and density on the magnetic and magneto-optical properties of yttrium iron garnet films by magnetron sputtering method

Journal Article · Fri Oct 15 00:00:00 EDT 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3489947· OSTI ID:21476517

Qinghui, Yang; Huaiwu, Zhang; Qiye, Wen; Yingli, Liu ^[1]

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1. State Key Laboratory of Electronic Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054 (China)

Yttrium iron garnet films were deposited on Si and Si/CeO{sub 2} substrates by magnetron sputtering method followed by postannealing. By varying the fabrication parameters such as sputtering atmosphere, sputtering power, and annealing atmosphere, single phase garnet films were obtained with different off-stoichiometry and film density. The dependence of cation ratio, magnetic and magneto-optical characteristics, and absorption coefficient were systemically investigated. The results reveal that a proper oxygen pressure in both sputtering and annealing process give rise to a small cation ratio of (Fe{sup 2+} or Fe{sup 4+})/Fe{sup 3+}, thus is beneficial to obtain large saturation magnetization, large Faraday rotation, and small optical absorption. The sputtering power can also affect the properties of the film through changing the film density. Our results indicate that the properties of sputtering deposited yttrium iron garnet (YIG) film can be easily tuned and optimized by modifying the off-stoichiometry and density of the film, thus provides flexibility to fabricate YIG film for extensive applications.

• OSTI ID: 21476517
• Journal Information: Journal of Applied Physics, Vol. 108, Issue 7; Other Information: DOI: 10.1063/1.3489947; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION
ANNEALING
CATIONS
CERIUM OXIDES
DEPOSITION
FARADAY EFFECT
FERRITE GARNETS
IRON IONS
MAGNETIC MATERIALS
MAGNETIZATION
OPTICAL PROPERTIES
SILICON
SPUTTERING
STOICHIOMETRY
SUBSTRATES
THIN FILMS
YTTRIUM COMPOUNDS
CERIUM COMPOUNDS
CHALCOGENIDES
CHARGED PARTICLES
ELEMENTS
FILMS
HEAT TREATMENTS
IONS
MATERIALS
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE EARTH COMPOUNDS
SEMIMETALS
SORPTION
TRANSITION ELEMENT COMPOUNDS