Heteroepitaxial growth of SnO{sub 2} thin films on SrTiO{sub 3} (111) single crystal substrate by laser molecular beam epitaxy

Journal Article · Fri Jan 15 00:00:00 EST 2010 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3273494· OSTI ID:21476077

Ke, C; Yang, Z; Zhu, W ^[1]; Pan, J S ^[2]; Karamat, S ^[3]

---

1. Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798 (Singapore)
2. Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A-STAR), 3 Research Link, Singapore 117602 (Singapore)
3. Natural Science and Science Education, National Institute of Education, Nanyang Technological University, Singapore 637616 (Singapore)

SnO{sub 2} films with a thickness around 150 nm were deposited on the (111) surface of a SrTiO{sub 3} single crystal substrate by laser molecular beam epitaxy technique in a temperature range 600-750 deg. C and oxygen pressure from 10{sup -3} to 1 Pa, respectively. The growth behavior was in situ monitored by reflection high-energy electron diffraction, and the epitaxial relations were further investigated by ex situ x-ray diffraction measurement in different geometries. All the films were confirmed to be highly (200) oriented showing good crystalline quality, despite the large lattice mismatch between SnO{sub 2} and SrTiO{sub 3}. Based on the crystallographic model and structure analysis, six equivalent directions in the SrTiO{sub 3} (111) surface for the nucleation of SnO{sub 2} were discovered, which confirmed the existence of sixfold symmetrical domains in the SnO{sub 2} epilayer. Additionally, the optical dielectric function of the SnO{sub 2}/SrTiO{sub 3} epitaxial film was simulated by the Tauc-Lorentz-Drude model in the UV-vis-NIR region.

• OSTI ID: 21476077
• Journal Information: Journal of Applied Physics, Vol. 107, Issue 1; Other Information: DOI: 10.1063/1.3273494; (c) 2010 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CRYSTAL DEFECTS
DIELECTRIC MATERIALS
ELECTRON DIFFRACTION
INFRARED SPECTRA
MOLECULAR BEAM EPITAXY
MONOCRYSTALS
SEMICONDUCTOR MATERIALS
STRONTIUM TITANATES
SUBSTRATES
SURFACES
THIN FILMS
TIN OXIDES
ULTRAVIOLET SPECTRA
X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
CRYSTALS
DIFFRACTION
EPITAXY
FILMS
MATERIALS
OXIDES
OXYGEN COMPOUNDS
SCATTERING
SPECTRA
STRONTIUM COMPOUNDS
TIN COMPOUNDS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS